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Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope

Received: 31 March 2015    Accepted: 31 March 2015    Published: 14 March 2016
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Abstract

A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.

DOI 10.11648/j.optics.s.2015040301.20
Published in Optics (Volume 4, Issue 3-1, June 2015)

This article belongs to the Special Issue Optical Techniques for Deformation, Structure and Shape Evaluation

Page(s) 43-49
Creative Commons

This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.

Copyright

Copyright © The Author(s), 2024. Published by Science Publishing Group

Keywords

Deformation Measurement, Strain, High Speed, Fast Scanning Moiré Method, Microscope, Grating

References
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[2] R. Weller and B. Shepard, “Displacement Measurement by Mechanical Interferometry”, Proc. Soc. Exp. Stress Analysis, Vol. 6(1), 1948, pp. 35-38
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[5] Y. J. Li, H. M. Xie, B. Q. Guo, et al., “Fabrication of high-frequency moiré gratings for microscopic deformation measurement using focused ion beam milling”, Journal of Micromechanics and Microengineering, Vol. 20(5), 2010, pp. 055037
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Author Information
  • Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan

  • Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan

  • Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan

  • Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan

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  • APA Style

    Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki. (2016). Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics, 4(3-1), 43-49. https://doi.org/10.11648/j.optics.s.2015040301.20

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    ACS Style

    Qinghua Wang; Shien Ri; Hiroshi Tsuda; Takashi Tokizaki. Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics. 2016, 4(3-1), 43-49. doi: 10.11648/j.optics.s.2015040301.20

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    AMA Style

    Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki. Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope. Optics. 2016;4(3-1):43-49. doi: 10.11648/j.optics.s.2015040301.20

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  • @article{10.11648/j.optics.s.2015040301.20,
      author = {Qinghua Wang and Shien Ri and Hiroshi Tsuda and Takashi Tokizaki},
      title = {Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope},
      journal = {Optics},
      volume = {4},
      number = {3-1},
      pages = {43-49},
      doi = {10.11648/j.optics.s.2015040301.20},
      url = {https://doi.org/10.11648/j.optics.s.2015040301.20},
      eprint = {https://download.sciencepg.com/pdf/10.11648.j.optics.s.2015040301.20},
      abstract = {A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.},
     year = {2016}
    }
    

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  • TY  - JOUR
    T1  - Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope
    AU  - Qinghua Wang
    AU  - Shien Ri
    AU  - Hiroshi Tsuda
    AU  - Takashi Tokizaki
    Y1  - 2016/03/14
    PY  - 2016
    N1  - https://doi.org/10.11648/j.optics.s.2015040301.20
    DO  - 10.11648/j.optics.s.2015040301.20
    T2  - Optics
    JF  - Optics
    JO  - Optics
    SP  - 43
    EP  - 49
    PB  - Science Publishing Group
    SN  - 2328-7810
    UR  - https://doi.org/10.11648/j.optics.s.2015040301.20
    AB  - A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.
    VL  - 4
    IS  - 3-1
    ER  - 

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