The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates
American Journal of Optics and Photonics
Volume 3, Issue 4, August 2015, Pages: 48-53
Received: Jul. 17, 2015; Accepted: Jul. 29, 2015; Published: Aug. 11, 2015
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Simion Jitian, Politehnica University Timisoara, Faculty of Engineering, Hunedoara, Romania
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The ellipsometrical analysis of the external specular reflection of light on nonabsorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical nonabsorbing superficial films the curves =f(df) and =f(df) are periodical, while the curves =f() are closed. The paper presents observations on the dependence of the ellipsometric parameters  and  on df. The analysis of the periodicity of these curves allows us to correctly determine the film thickness for thicknesses greater than dmin. The value of dmin depends on the refractive index nf of the surface film, the incidence angle φ0 and the wavelength λ of the incident radiation. The dependence of dmin on nf, φ0 and λ is analyzed. From the curve shape we can draw conclusions with respect to the domain of small errors, allowing us to correctly determine the thickness and refraction index of superficial films.
Ellipsometry, Superficial Film, External Specular Reflection
To cite this article
Simion Jitian, The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates, American Journal of Optics and Photonics. Vol. 3, No. 4, 2015, pp. 48-53. doi: 10.11648/j.ajop.20150304.12
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