Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System

Krutideepa Bhol

doi:doi:10.11648/j.eas.20170204.12

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Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System

Krutideepa Bhol

Published in Engineering and Applied Sciences (Volume 2, Issue 4)

Received: 28 May 2017 Accepted: 6 June 2017 Published: 11 August 2017

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Abstract

Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.

Published in	Engineering and Applied Sciences (Volume 2, Issue 4)
DOI	10.11648/j.eas.20170204.12
Page(s)	66-71
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2024. Published by Science Publishing Group

Keywords

MEMS, Pressuresensor, COMSOL Multiphysics, Sensitivity

References

[1]	C. Hierold, B. Clasbrummel, "Low power integrated pressure sensor system for medical applications", Sensors and Actuators (Part A) Physical, vol 73, pp 68-67, 1999.
[2]	Y. Zhang, S. Massoud-Ansari, G. Meng, W. Kim, and N. Najafi, A Ultra-Sensitive, High-Vacuum Absolute Capacitive Pressure Sensor, Technical Digest of the 14th IEEE International Conf. on Micro Electro Mechanical Systems(2001), pp 166-169, Interlaken, Switzerland, (2001) 21-25.
[3]	Y. Zhang and K. D. Wise, A Barometric Pressure Sensor with Multiple Elements, Digest IEEE Transducers ’95 Stockholm, Sweden, (6) (1995).
[4]	Y. Zhang and K. D. Wise, An Ultra-Sensitive Capacitive Pressure Sensor with a Bossed Dielectric Diaphragms, Technical Digest of the IEEE Solid-state Sensors and Actuators workshop, Hilton Head Island, SC, (1994).
[5]	Capacitance Based Pressure Transducer Handbook, Understanding, specifying and applying Capacitive Pressure Transducers.
[6]	Heerens, Willem Chr., “Application of capacitance techniques in sensor design,” J. Phys. E: Sci. Instrum, vol 19, pp. 897-906, 1986.
[7]	Puers, Robert, “Capacitive sensors: when and how to use them,” Sensors and Actuators, vol A37-A38, pp. 93-105, 1993.
[8]	Sensata Technologies, Pressure Transducers Technical Note 1, Understanding And Specifying Capacitive Pressure Transducers, Mitch Berkson, Original, Dave Field, Update, (2007).
[9]	W. H. Ko, Q. Wang, “Touch mode capacitive pressure sensors for industrial applications”, in IEEE International Conference, Micro Elec. Mech. Syst. (MEMS) (1997), pp 284-289.
[10]	Y. Hezarjaribi, Golestan University, Gorgan, Iran, M. N. Hamidon, A. R. Bahadorimehr University Putra Malaysia, 43400 UPM Serdang, Selangor, Malaysia, S. H. Keshmiri, University of Ferdowsi, Mashhad, Iran Capacitive pressure sensor technology and applications, ICSE (2008) Proceedings. (2008), Johor Bahru, Malaysia.
[11]	Toshihiko Omi, Syo Saskai, Fumihiko Sato and Mikio Matsumoto, Central R&D Laboratory Corporate Research and Development Headquarters, Omron Corporation, Capacitive Pressure Sensor Technology and Applications for Semiconductor Manufacturing Equipment.
[12]	A. V. Chavan and K. D. Wise, A Multi-Lead Vacuum-Sealed Capacitive Pressure Sensor, Technical Digest of Solid-state Sensor and Actuator Workshop, Hilton Head, S. C., pp 212-215, 1998.
[13]	L. K. Baxter, “Capacitive Sensors,” IEEE Press, Piscataway N. J., 1997.
[14]	L. Chitra, Y. Ramakrishnan, "Design optimization of piezoresistive Multi MEMS Device for lubricating system", Advances in Natural and Applied sciences, vol 8, pp 76-84, 2014.
[15]	A. V. Chavan and K. D. Wise, A Batch-Processed Vacuum Sealed Capacitive Pressure sensor, Digest int. Conf. on Solid-State Sensors and Actuators (Transducers’97), Chicago, pp 1449-1452, 1997.
[16]	Y. Zhang, R. Howver, B. Gogoi and N. Yazdi, A High Sensitive Ultra Thin MEMS Capacitive Pressure Sensor, Transducers'll, Beijing, China, pp 5-9, 2011.
[17]	G. Fragiacomo, A micromachined capacitive pressure sensor with signal conditioning electronics, Master’s theis, Universitàdeglistudi di Trieste, Italy, (2008).
[18]	M. S. Tabarestani, B. A. Ganji, "Analytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm", International Journal of Engineering, vol 26, pp 297-302, 2013.
[19]	W. H. Ko, "Solid-state capacitive pressure transducers", Sensors and Actuators A: Physical, vol. 10, pp 303-320, 1986.
[20]	A. Ravi, R. M. A. Krishna, J. B. Christen, Modeling and Simulation of Dual Application Capacitive MEMS Sensor, Excerpt from the Proceedings of the COMSOL Conference in Boston, 2014.
[21]	E. G. Bakhoum and M. H. M. Cheng, "Novel Capacitive Pressure Sensor", Journal of Microelectromechanical Systems, vol 19, pp 345-348, 2010.
[22]	B. A. Ganji, M. Shams Nateri, "Modeling of Capacitance and Sensitivity of a MEMS Pressure Sensor with Clamped Square Diaphragm", International Journal of Engineering, vol 26, pp 102-108, 2013.
[23]	Y. Hezarjaribi, M. N. Hamidon, A. R. Bahadorimehr, S. H. Keshmiri, Capacitive pressure sensor technology and applications, ICSE (2008) Proceedings.
[24]	T. Pedersen, G. Fragiacomo, O. Hansen, and E. VThomsen, "Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance", Sensors and Actuators A: Physical, vol 154, pp 5-41, 2009.
[25]	Zhang, Y., Howver, R., Gogoi, B. and Yazdi, N., A highsensitive ultra-thin mems capacitive pressure sensor, in Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 16^th International, IEEE., pp 112-115, 2011.
[26]	M. M Rahman, and S. Chowdhury, Square diaphragm cmut capacitance calculation using a new deflection shape function, Journal of Sensors, vol 6, pp 234-238, 2011.
[27]	C. Zhenhai and R. C. Luo, "Design and implementation of capacitive proximity sensor using microelectromechanical systems technology, Industrial Electronics", IEEE Transactions, vol 45, pp 886-894, 1998.
[28]	C. S. Sander, J. W. Knutti, J. D. Meindl, A monolithic capacitive pressure sensor with pulse-period output, IEEE Transactions on Electron Devices, vol 27, pp 927-930, 1980,.
[29]	G. Mishra, N. Paras, A. Arora, P. J. George," Simulation of MEMS Capacitive Pressure Sensor Using Comsol Multhysics", International Journal of Applied Engineering Research, vol 7, pp 1-5, 2012.
[30]	TamasKarpati, Andrea Edit Pap, Sandor Kulinyi, "Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing", Electrical Engineering and Computer Science, vol 57, pp 3-7, 2013.
[31]	P. Eshwaran, S. Malarvizhi, “MEMS Capacitive Pressure sensors: A review on Recent Development and Prospective”, IJET, vol 5, 2013.
[32]	B. A. Ganji, M. Shams Nateri, "Modeling of Capacitance and Sensitivity of a MEMS Pressure Sensor with Clamped Square Diaphragm", International Journal of Engineering Transaction B: Applications, vol 26, pp 1331-1336, 2013.
[33]	Norhayati Soindan Burhanuddin Yeop Majilis, An Analytical Study on Diaphragm Behaviour for Micromachined Capacitive Pressure Sensor, in Proceedings of the IEEE International Conference of Semiconductor Electronics (ICSE), Penang, Malaysia, (2002), 505-510.
[34]	AshwinSimha, S. M. Kulkarni, S. Meenatchisundaarm, "An Analytical Method to Determine the Response of a Micro Capacitive Pressure Sensor, Sensors & Transducers", vol 130, vol 118-126, 2011.
[35]	S.-P. Chang, M. G. Allen, "Capacitive pressure sensors with stainless steel diaphragm and substrate", Journal of Micromechanics and Microengineering, vol 14, pp 612-618, 2004.
[36]	H. Jeahyeong and A. M. Shannon, "Smooth Contact Capacitive Pressure Sensors in Touch- and Peeling-Mode Operation", IEEE Sensors Journal, vol 9, pp 199-207, 2009.
[37]	Yafan Zhang, Sonbol Massoud-Ansari, Guangqing Meng, Woojin Kim, and Nader Najafian, Ultra-Sensitive, High-Vacuum Absolute Capacitive Pressure Sensor, Proceedings of IEEE conference, pp 166-169, (2001).
[38]	Vance d A. Browne, George E Kochanek, Capacitance pressure sensor, United States patent 4523474, 1-6, 18 (1985).
[39]	W. P. Eaton, Bevan D, James H smith, Capacitance pressure sensor, US patent 6012336, 1-14, 11 (2000).
[40]	P. Eswaran, S. Malarvizhi, Modeling of High sensitive MEMS differential Capacitive Pressure Sensor with Polymer diaphragm Membrane, Proceedings of the 9th Nanomechanical sensing workshop NMC 2012, IIT Bombay Mumbai, India, pp 153-154, (2012).
[41]	P. Eswaran, S. Malarvizhi, Modeling of MEMS Capacitive Differential Pressure Sensor, Proceedings of (2013) International Conference on Circuits, Power and Computing Technologies [ICCPCT-2013], Noorul Islam University, Kanyakumari, India, pp 699 -702, (2013).
[42]	Liwei L, Weijie Y (1998) MEMS pressure sensors for aerospace applications. In: Proceedings of IEEE aerospace conference, 1: 429–436. doi: 10.1109/AERO.1998.686941.
[43]	Lee Y et al "A batch-fabricated silicon capacitive pressuretransducer with low temperature sensitivity", IEEE Trans Electron Dev, vol 29, pp 42–48, 1982.
[44]	P. Eswaran, S. Malarvizhi, "MEMS Capacitive Pressure Sensors: A Review on Recent Development and Prospective", International Journal of Engineering and Technology (IJET), vol 5, pp 323-328, 2013.
[45]	Zhou M-X et al, "Modeling, design and fabrication of a triple layered capacitive pressure sensor. Sens Actuators", vol 117: pp 71–81, 2005.
[46]	Wang Q, Ko WH, "Modeling of touch mode capacitive sensors and diaphragms. Sens Actuators A" vol 75, pp 230–241, 1999.
[47]	Zhang Y et al (2011) A high-sensitive ultra thin MEMS capacitive pressure sensor. In: Proceedings of 16th international conference on solid state sensors, actuators and microsystems conference (Transducers), China, pp 112–115.
[48]	R. S. Okojie et al (1997) Operation of a (6H)-SiC pressure sensor at 500 C. In: Proceedings of international conference on solid-state sensors and actuators, pp 1407–1409.
[49]	P. C. Sung et al," Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate". Sens Actuators A vol 116, pp 195–204, 2005.
[50]	N. Jithendra et al, "MEMS-capacitive pressure sensor fabricated using printed-circuit-processing techniques", IEEE Sens J vol 6, pp 1374–1375, 2006.
[51]	J. Han et al, "Smooth contact capacitive pressure sensors intouch- and peeling-mode operation". IEEE Sens J vol 9, pp 199–209, 2009.
[52]	V. Abhijeet et al, "Batch processing of vacuum sealed capacitive pressure sensor. J Microelectromech Syst" vol 10, pp 580–588, 2001.
[53]	B. Duck et al Design and simulation of MEMS based combdrive pressure sensor for pediatric postoperative monitoring application. In: 2003 summer bioengineering conference, Florida, pp 1239–1240, 2003.
[54]	P. Eswaran, S. Malarvizhi, "Simulation analysis of MEMS based capacitive differential pressure sensor for aircraft application", Adv Mater Res vol 4, pp 4152–4156, 2012a.
[55]	P. Eswaran, S. Malarvizhi, "MEMS capacitive pressure sensors: a review on recent development and prospective", Int J Eng Technol, vol 5, pp 2734–2746, 2013a.
[56]	P. Eswaran, S. Malarvizhi," Sensitivity analysis on MEMS capacitive differential pressure sensor with bossed diaphragm membrane". In: IEEE international conference on devices, circuits and systems (ICDCS), Karunya University, Coimbatore, India, 15th and 16th March, pp 705–709, 2012d.
[57]	V. Mitrakos et al, “Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges”, Micromachines, vol 41, pp 1-10, 2017.
[58]	K. B. Balavadab, B. G. Sreeparamatti, V. B. Math, “Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement”, International Journal of Computer Applications, vol 163, pp 40-46, 2017.
[59]	COMSOL Multiphysics 5.0.

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Krutideepa Bhol. (2017). Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Engineering and Applied Sciences, 2(4), 66-71. https://doi.org/10.11648/j.eas.20170204.12

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Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng. Appl. Sci. 2017, 2(4), 66-71. doi: 10.11648/j.eas.20170204.12

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AMA Style

Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng Appl Sci. 2017;2(4):66-71. doi: 10.11648/j.eas.20170204.12

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@article{10.11648/j.eas.20170204.12,
  author = {Krutideepa Bhol},
  title = {Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System},
  journal = {Engineering and Applied Sciences},
  volume = {2},
  number = {4},
  pages = {66-71},
  doi = {10.11648/j.eas.20170204.12},
  url = {https://doi.org/10.11648/j.eas.20170204.12},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.eas.20170204.12},
  abstract = {Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.},
 year = {2017}
}

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TY  - JOUR
T1  - Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System
AU  - Krutideepa Bhol
Y1  - 2017/08/11
PY  - 2017
N1  - https://doi.org/10.11648/j.eas.20170204.12
DO  - 10.11648/j.eas.20170204.12
T2  - Engineering and Applied Sciences
JF  - Engineering and Applied Sciences
JO  - Engineering and Applied Sciences
SP  - 66
EP  - 71
PB  - Science Publishing Group
SN  - 2575-1468
UR  - https://doi.org/10.11648/j.eas.20170204.12
AB  - Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.
VL  - 2
IS  - 4
ER  -

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Krutideepa Bhol

Department of Electronics & Instrumentation Engineering, Institute of Technical Education & Research, Siksha 'O' Anusandhan University, Bhubaneswar, India

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APA Style

Krutideepa Bhol. (2017). Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Engineering and Applied Sciences, 2(4), 66-71. https://doi.org/10.11648/j.eas.20170204.12

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ACS Style

Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng. Appl. Sci. 2017, 2(4), 66-71. doi: 10.11648/j.eas.20170204.12

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AMA Style

Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng Appl Sci. 2017;2(4):66-71. doi: 10.11648/j.eas.20170204.12

Copy | Download

@article{10.11648/j.eas.20170204.12,
  author = {Krutideepa Bhol},
  title = {Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System},
  journal = {Engineering and Applied Sciences},
  volume = {2},
  number = {4},
  pages = {66-71},
  doi = {10.11648/j.eas.20170204.12},
  url = {https://doi.org/10.11648/j.eas.20170204.12},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.eas.20170204.12},
  abstract = {Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.},
 year = {2017}
}

Copy | Download

TY  - JOUR
T1  - Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System
AU  - Krutideepa Bhol
Y1  - 2017/08/11
PY  - 2017
N1  - https://doi.org/10.11648/j.eas.20170204.12
DO  - 10.11648/j.eas.20170204.12
T2  - Engineering and Applied Sciences
JF  - Engineering and Applied Sciences
JO  - Engineering and Applied Sciences
SP  - 66
EP  - 71
PB  - Science Publishing Group
SN  - 2575-1468
UR  - https://doi.org/10.11648/j.eas.20170204.12
AB  - Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.
VL  - 2
IS  - 4
ER  -

Copy | Download