International Journal of Sensors and Sensor Networks

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Frequency Measuring Transducers Based on the Piezoresonance Oscillator Systems with External MEMS Control

Received: 09 July 2013    Accepted:     Published: 20 August 2013
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Abstract

The paper represents the mathematical model of piezoresonance oscillator system (POS), which consists of high- quality element- quartz resonator (QR), the element of connection and low- quality loading. Based on analyses of main characteristics of POS in the system of MatLab, the conditions of minimization of negative impact of low- quality loading onto personal characteristics of QR are defined. The new class of frequency- compensated piezoresonance oscillation systems (FCPOS) based on the systems of automated frequency control (AFC) is proposed. On the example of measuring transducer of humidity of the discrete substances, the peculiarities of building and optimization of characteristics of primary measuring transducers (PMT) “physical parameter- frequency” based on FCPOS are studied. The possibility of increasing the linearity of converting of PMT of present type by means of applying matrix MEMS- transducers, which allows realizing the multi- level mode of control over the elements of connections of FCPOS, is shown.

DOI 10.11648/j.ijssn.20130104.11
Published in International Journal of Sensors and Sensor Networks (Volume 1, Issue 4, August 2013)
Page(s) 41-49
Creative Commons

This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.

Copyright

Copyright © The Author(s), 2024. Published by Science Publishing Group

Keywords

Quartz Resonator, Q-Factor, Low-Quality Loading, Primary Measuring Transducer, MEMS-Capacity

References
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Author Information
  • Department of Radio-electronic Devices and Telecommunication, Khmelnitskiy National University, Khmelnitskiy, Ukraine

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  • APA Style

    Alla  Taranchuk, Sergey Pidchenko. (2013). Frequency Measuring Transducers Based on the Piezoresonance Oscillator Systems with External MEMS Control. International Journal of Sensors and Sensor Networks, 1(4), 41-49. https://doi.org/10.11648/j.ijssn.20130104.11

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    ACS Style

    Alla  Taranchuk; Sergey Pidchenko. Frequency Measuring Transducers Based on the Piezoresonance Oscillator Systems with External MEMS Control. Int. J. Sens. Sens. Netw. 2013, 1(4), 41-49. doi: 10.11648/j.ijssn.20130104.11

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    AMA Style

    Alla  Taranchuk, Sergey Pidchenko. Frequency Measuring Transducers Based on the Piezoresonance Oscillator Systems with External MEMS Control. Int J Sens Sens Netw. 2013;1(4):41-49. doi: 10.11648/j.ijssn.20130104.11

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  • @article{10.11648/j.ijssn.20130104.11,
      author = {Alla  Taranchuk and Sergey Pidchenko},
      title = {Frequency Measuring Transducers Based on the Piezoresonance Oscillator Systems with External MEMS Control},
      journal = {International Journal of Sensors and Sensor Networks},
      volume = {1},
      number = {4},
      pages = {41-49},
      doi = {10.11648/j.ijssn.20130104.11},
      url = {https://doi.org/10.11648/j.ijssn.20130104.11},
      eprint = {https://download.sciencepg.com/pdf/10.11648.j.ijssn.20130104.11},
      abstract = {The paper represents the mathematical model of piezoresonance oscillator system (POS), which consists of high- quality element- quartz resonator (QR), the element of connection and low- quality loading. Based on analyses of main characteristics of POS in the system of MatLab, the conditions of minimization of negative impact of low- quality loading onto personal characteristics of QR are defined. The new class of frequency- compensated piezoresonance oscillation systems (FCPOS) based on the systems of automated frequency control (AFC) is proposed. On the example of measuring transducer of humidity of the discrete substances, the peculiarities of building and optimization of characteristics of primary measuring transducers (PMT) “physical parameter- frequency” based on FCPOS are studied. The possibility of increasing the linearity of converting of PMT of present type by means of applying matrix MEMS- transducers, which allows realizing the multi- level mode of control over the elements of connections of FCPOS, is shown.},
     year = {2013}
    }
    

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  • TY  - JOUR
    T1  - Frequency Measuring Transducers Based on the Piezoresonance Oscillator Systems with External MEMS Control
    AU  - Alla  Taranchuk
    AU  - Sergey Pidchenko
    Y1  - 2013/08/20
    PY  - 2013
    N1  - https://doi.org/10.11648/j.ijssn.20130104.11
    DO  - 10.11648/j.ijssn.20130104.11
    T2  - International Journal of Sensors and Sensor Networks
    JF  - International Journal of Sensors and Sensor Networks
    JO  - International Journal of Sensors and Sensor Networks
    SP  - 41
    EP  - 49
    PB  - Science Publishing Group
    SN  - 2329-1788
    UR  - https://doi.org/10.11648/j.ijssn.20130104.11
    AB  - The paper represents the mathematical model of piezoresonance oscillator system (POS), which consists of high- quality element- quartz resonator (QR), the element of connection and low- quality loading. Based on analyses of main characteristics of POS in the system of MatLab, the conditions of minimization of negative impact of low- quality loading onto personal characteristics of QR are defined. The new class of frequency- compensated piezoresonance oscillation systems (FCPOS) based on the systems of automated frequency control (AFC) is proposed. On the example of measuring transducer of humidity of the discrete substances, the peculiarities of building and optimization of characteristics of primary measuring transducers (PMT) “physical parameter- frequency” based on FCPOS are studied. The possibility of increasing the linearity of converting of PMT of present type by means of applying matrix MEMS- transducers, which allows realizing the multi- level mode of control over the elements of connections of FCPOS, is shown.
    VL  - 1
    IS  - 4
    ER  - 

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