The ultraviolet laser has been used to polish SiC ceramics by its thermal and photochemical effect in previous works to resolve the application limitation of the SiC ceramics for the demand of high-precision applications. In this paper, the "cold polishing" technology of SiC ceramics under photon absorption was studied by using the 355nm ultraviolet picosecond laser, the surface roughness was reduced from Ra=1.616μm to Ra=1.087μm only even though the polishing process parameters has been optimized, because the thermal effect such as gasification was found due to the ablation threshold, and the surface quality of brittle ceramics might be degraded by thermal effect during laser polishing. The ablation threshold of the SiC was obtained as about 0.3J/cm2. The method of ultraviolet picosecond laser "cold polishing" with infrared laser as preheating source was innovatively proposed to promote the photon-absorption process. By adjusting the preheating process parameters of the infrared laser, the macroscopic morphology and microstructure of polished SiC ceramic surface were analyzed, so as to further clarify the mechanism of photon-absorption effect during the polishing process. It was found that the “cold polishing” by the photon absorption can be promoted owing to the decrease of the ablation threshold under the infrared laser preheating process. Defects such as cracks and porosity cannot be found under the 200× optical microscope, the surface roughness of about 0.66μm can be obtained compared with the 1.087μm by the polishing of ultraviolet picosecond laser. Thus, the ultraviolet picosecond laser polishing with infrared laser preheating technology can be used as the high precise and high efficient polishing technology for the SiC ceramics.
| Published in | American Journal of Environmental Science and Engineering (Volume 9, Issue 2) |
| DOI | 10.11648/j.ajese.20250902.14 |
| Page(s) | 68-75 |
| Creative Commons |
This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited. |
| Copyright |
Copyright © The Author(s), 2025. Published by Science Publishing Group |
SiC Ceramics, Ultraviolet Picosecond Laser, Photon Absorption, Ablation Threshold, Cold Polishing
| [1] | Ge S. Preparation and Properties Study of Silicon Carbide Ceramics with High Electrical Resistance and High Thermal Conductivity [Doctoral dissertation], University of Chinese Academy of Sciences (Shanghai Institute of Ceramics), 2021. |
| [2] | Oreshkin O, M Küpper, Temmler A, et al. Active reduction of waviness through processing with modulated laser power [J]. Journal of Laser Applications, 2015, 27(2): 022004. |
| [3] | LIU G L, HUANG Z R, LU XJ, et al. Removal behaviors of different SiC ceramics during polishing. Journal of Materials Seience &Technology, 2010, 26(2): 125-130. |
| [4] | Sugioka K. Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review [J]. International Journal of Extreme Manufacturing, 2019, 1(1): 12003. |
| [5] | Dewil R, Vansteenwegen P, Cattrysse D. A review of cutting path algorithms for laser cutters [J]. The International Journal of Advanced Manufacturing Technology, 2016, 87(5-8): 1865-1884. |
| [6] | Zhou Y, Zhao Z, Zhang W, et al. Experiment Study of Rapid Laser Polishing of Freeform Steel Surface by Dual-Beam [J]. Coatings, 2019, 9(5): 324. |
| [7] | Chow M T, Hafiz A M, Tutuneafatan O R, et al. Experimental statistical analysis of laser micropolishing process [C]. international symposium on optomechatronic technologies, 2010: 1-6. |
| [8] | Mai T A, Lim G C. Micromelting and its effects on surface topography and properties in laser polishing of stainless steel [J]. Journal of Laser Applications, 2004, 16(4): 221-228. |
| [9] | Fang Zhihao, Lu Libin, Guan Yingchun et al. Laser polishing of Additive Manufactured Superalloy [J]. Procedia CIRP 71.2018, 150-154. |
| [10] | Li Yuhang; Cheng Xu; Guan Yingchun. Ultrafine microstructure development in laser polishing of selective laser melted Ti alloy [J]. Journal of Materials Science & Technology, 2021(83), 1-6. |
| [11] | Haibing Xiao, Yongquan Zhou, Mingjun Liu. Laser polishing of tool steel using a continuous-wave laser assisted by a steady magnetic field [J], AIP Advance, 2020 (10), 025319, 1-9. |
| [12] | Temmler A.; Ross I.; Luo J.; Jacobs G.; Schleifenbaum J. H. Influence of global and local process gas shielding on surface topography in laser micro polishing (LμP) of stainless steel 410 [J]. Surface and Coatings Technology 2020(403), 126401-126426. |
| [13] | A. Temmler; D. Liu; J. Luo; Influence of pulse duration and pulse frequency on micro-roughness for laser micro polishing (LµP) of stainless steel AISI 410 [J]. Applied Surface Science, 2020(510), 145272. |
| [14] | Sun, Z. Q. Theoretical and Simulation Study on Short-Pulse Laser Polishing of Mold Surfaces [Doctoral dissertation], Harbin Institute of Technology, 2020. |
| [15] | Li, W. B. Process Study on Femtosecond Laser Polishing of Silicon Carbide Ceramic Materials [Doctoral dissertation], Harbin Institute of Technology, 2011. |
| [16] | Leone C, Genna S, Tagliaferri F, et al. Experimental investigation on laser milling of aluminium oxide using a 30 W Q-switched Yb: YAG fiber laser [J]. Optics & Laser Technology, 2016. |
| [17] | Jian L, Ji L, Yan H, et al. Precise micromachining of yttria-tetragonal zirconia polycrystal ceramic using 532nm nanosecond laser [J]. Ceramics International, 2016, 42(3): 4377-4385. |
| [18] | Ximin Zhang, Lingfei Ji, Litian Zhang, et al. Polishing of alumina ceramic to submicrometer surface roughness by picosecond laser [J]. Surface and Coatings Technology, 2020, 397. |
| [19] | Hua, X. G., Wei, X., Zhou, M., & Xie, X. Z. Experimental study on the mechanism of 355 nm ultraviolet laser polishing of Al2O3 ceramics [J]. Chinese Journal of Lasers, 2014 (12), 64–69. |
| [20] | Zhou, M., Wei, X., Xie, X. Z., & Hu, W. Study on the process of 355 nm ultraviolet laser polishing of Al2O3 ceramics [J]. Laser Technology, 2014, 38(4), 556–560. |
| [21] | Liu X, Du D, Mourou G. Laser ablation and micromachining with ultrashort laser pulses [J]. Quantum Electronics IEEE Journal of, 1997, 33(10): 1706-1716. |
| [22] | Zhao, Q. L., Jiang, T., Dong, Z. W., et al. Ablation threshold and material removal mechanism of femtosecond laser processing of SiC [J]. Journal of Mechanical Engineering, 2010 (21), 6. |
APA Style
Luo, B., Xiao, H., Zhou, Y., Liu, M., Xu, X., et al. (2025). The Effect of the Infrared Laser Pre-heating on Ultraviolet Picosecond Laser Polishing of SiC Ceramics. American Journal of Environmental Science and Engineering, 9(2), 68-75. https://doi.org/10.11648/j.ajese.20250902.14
ACS Style
Luo, B.; Xiao, H.; Zhou, Y.; Liu, M.; Xu, X., et al. The Effect of the Infrared Laser Pre-heating on Ultraviolet Picosecond Laser Polishing of SiC Ceramics. Am. J. Environ. Sci. Eng. 2025, 9(2), 68-75. doi: 10.11648/j.ajese.20250902.14
Share This Article
Twitter
Linked In
Facebook
Copy
Download@article{10.11648/j.ajese.20250902.14,
author = {Bowei Luo and Haibing Xiao and Yongquan Zhou and Mingjun Liu and Xiaomei Xu and Wei Zhang},
title = {The Effect of the Infrared Laser Pre-heating on Ultraviolet Picosecond Laser Polishing of SiC Ceramics
},
journal = {American Journal of Environmental Science and Engineering},
volume = {9},
number = {2},
pages = {68-75},
doi = {10.11648/j.ajese.20250902.14},
url = {https://doi.org/10.11648/j.ajese.20250902.14},
eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ajese.20250902.14},
abstract = {The ultraviolet laser has been used to polish SiC ceramics by its thermal and photochemical effect in previous works to resolve the application limitation of the SiC ceramics for the demand of high-precision applications. In this paper, the "cold polishing" technology of SiC ceramics under photon absorption was studied by using the 355nm ultraviolet picosecond laser, the surface roughness was reduced from Ra=1.616μm to Ra=1.087μm only even though the polishing process parameters has been optimized, because the thermal effect such as gasification was found due to the ablation threshold, and the surface quality of brittle ceramics might be degraded by thermal effect during laser polishing. The ablation threshold of the SiC was obtained as about 0.3J/cm2. The method of ultraviolet picosecond laser "cold polishing" with infrared laser as preheating source was innovatively proposed to promote the photon-absorption process. By adjusting the preheating process parameters of the infrared laser, the macroscopic morphology and microstructure of polished SiC ceramic surface were analyzed, so as to further clarify the mechanism of photon-absorption effect during the polishing process. It was found that the “cold polishing” by the photon absorption can be promoted owing to the decrease of the ablation threshold under the infrared laser preheating process. Defects such as cracks and porosity cannot be found under the 200× optical microscope, the surface roughness of about 0.66μm can be obtained compared with the 1.087μm by the polishing of ultraviolet picosecond laser. Thus, the ultraviolet picosecond laser polishing with infrared laser preheating technology can be used as the high precise and high efficient polishing technology for the SiC ceramics.
},
year = {2025}
}
TY - JOUR T1 - The Effect of the Infrared Laser Pre-heating on Ultraviolet Picosecond Laser Polishing of SiC Ceramics AU - Bowei Luo AU - Haibing Xiao AU - Yongquan Zhou AU - Mingjun Liu AU - Xiaomei Xu AU - Wei Zhang Y1 - 2025/06/11 PY - 2025 N1 - https://doi.org/10.11648/j.ajese.20250902.14 DO - 10.11648/j.ajese.20250902.14 T2 - American Journal of Environmental Science and Engineering JF - American Journal of Environmental Science and Engineering JO - American Journal of Environmental Science and Engineering SP - 68 EP - 75 PB - Science Publishing Group SN - 2578-7993 UR - https://doi.org/10.11648/j.ajese.20250902.14 AB - The ultraviolet laser has been used to polish SiC ceramics by its thermal and photochemical effect in previous works to resolve the application limitation of the SiC ceramics for the demand of high-precision applications. In this paper, the "cold polishing" technology of SiC ceramics under photon absorption was studied by using the 355nm ultraviolet picosecond laser, the surface roughness was reduced from Ra=1.616μm to Ra=1.087μm only even though the polishing process parameters has been optimized, because the thermal effect such as gasification was found due to the ablation threshold, and the surface quality of brittle ceramics might be degraded by thermal effect during laser polishing. The ablation threshold of the SiC was obtained as about 0.3J/cm2. The method of ultraviolet picosecond laser "cold polishing" with infrared laser as preheating source was innovatively proposed to promote the photon-absorption process. By adjusting the preheating process parameters of the infrared laser, the macroscopic morphology and microstructure of polished SiC ceramic surface were analyzed, so as to further clarify the mechanism of photon-absorption effect during the polishing process. It was found that the “cold polishing” by the photon absorption can be promoted owing to the decrease of the ablation threshold under the infrared laser preheating process. Defects such as cracks and porosity cannot be found under the 200× optical microscope, the surface roughness of about 0.66μm can be obtained compared with the 1.087μm by the polishing of ultraviolet picosecond laser. Thus, the ultraviolet picosecond laser polishing with infrared laser preheating technology can be used as the high precise and high efficient polishing technology for the SiC ceramics. VL - 9 IS - 2 ER -
School of Intelligent Manufacturing and Equipment, Shenzhen Institute of Information Technology, Shenzhen, China
Information